Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9195033 | Imaging optical system and imaging equipment | — | 2015-11-24 |
| 6958803 | Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics | Kazumasa Endo, Kazuo Ushida | 2005-10-25 |
| RE38403 | Projection optical system and projection exposure apparatus | Kazuo Ushida, Yutaka Suenaga, Romeo I. Mercado | 2004-01-27 |
| 6323938 | Method of characterizing photolithographic tool performance and photolithographic tool thereof | Ilya Grodnensky | 2001-11-27 |
| 6262793 | Method of manufacturing and using correction member to correct aberration in projection exposure apparatus | Kazumasa Endo, Kazuo Ushida | 2001-07-17 |
| 5943172 | Projection optical system and projection exposure apparatus | Kazuo Ushida, Yutaka Suenaga, Romeo I. Mercado | 1999-08-24 |
| 5831776 | Projection optical system and projection exposure apparatus | Kazuo Ushida, Yutaka Suenaga, Romeo I. Mercado | 1998-11-03 |
| 5805344 | Projection optical system and projection exposure apparatus | Kazuo Ushida, Yutaka Suenaga, Romeo I. Mercado | 1998-09-08 |
| 4437733 | Zoom lens | Tomowaki Takahashi, Kunio Konno | 1984-03-20 |
| 4352547 | Focusing screen of a camera | — | 1982-10-05 |