Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499673 | Method and apparatus for producing a nanocomposite material reinforced by unidirectionally oriented pre-dispersed alumina nanofibers | — | 2016-11-22 |
| 9303137 | Nanocomposite material containing alumina nanofibers and method for making same | — | 2016-04-05 |
| 8809436 | Apparatus and method for producing coatings reinforced with alumina nanofibers | — | 2014-08-19 |
| 8049903 | High resolution monitoring of CD variations | Jon Opsal, Heath A. Pois | 2011-11-01 |
| 7933026 | High resolution monitoring of CD variations | Jon Opsal, Heath A. Pois | 2011-04-26 |
| 7567351 | High resolution monitoring of CD variations | Jon Opsal, Heath A. Pois | 2009-07-28 |
| 7245352 | Alignment using latent images | Yan Borodovsky | 2007-07-17 |
| 6956659 | Measurement of critical dimensions of etched features | — | 2005-10-18 |
| 6750952 | Apparatus for preforming measurement of a dimension of a test mark for semiconductor processing | Kyoichi Suwa, Kazuo Ushida, Eric R. Johnson | 2004-06-15 |
| 6664121 | Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool | Steve Slonaker | 2003-12-16 |
| 6538753 | Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools | Eric R. Johnson, Steve Slonaker | 2003-03-25 |
| 6449031 | Method for use of a critical dimensional test structure | Kyoichi Suwa, Kazuo Ushida, Eric R. Johnson | 2002-09-10 |
| 6323938 | Method of characterizing photolithographic tool performance and photolithographic tool thereof | Toshihiro Sasaya | 2001-11-27 |
| 6094256 | Method for forming a critical dimension test structure and its use | Kyoichi Suwa, Kazuo Ushida, Eric R. Johnson | 2000-07-25 |
| 5835227 | Method and apparatus for determining performance characteristics in lithographic tools | Etsuya Morita, Kyoichi Suwa, Shigeru Hirukawa | 1998-11-10 |