Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5844728 | Catadioptric reduction projection optical system | Sumio Hashimoto, Yutaka Ichihara | 1998-12-01 |
| 5835285 | Projection optical system and exposure apparatus using the same | Hitoshi Matsuzawa, Misako Kobayashi, Kazumasa Endo | 1998-11-10 |
| 5835282 | Zoom lens system | Junichi Misawa | 1998-11-10 |
| 5831770 | Projection optical system and exposure apparatus provided therewith | Hitoshi Matsuzawa | 1998-11-03 |
| 5831776 | Projection optical system and projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida, Romeo I. Mercado | 1998-11-03 |
| 5805344 | Projection optical system and projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida, Romeo I. Mercado | 1998-09-08 |
| 5781278 | Projection optical system and exposure apparatus with the same | Hitoshi Matsuzawa, Misako Kobayashi | 1998-07-14 |
| 5751486 | Shake-preventing correction optical system | Junichi Misawa | 1998-05-12 |
| 5712735 | Catadioptric reduction projection optical system | Sumio Hashimoto, Yutaka Ichihara | 1998-01-27 |
| 5708531 | Objective lens system | Hiroshi Yamada, Itoe Ito | 1998-01-13 |
| 5694241 | Catadioptric reduction projection optical system and exposure apparatus employing the same | Toshiro Ishiyama | 1997-12-02 |
| 5668673 | Catadioptric reduction projection optical system | Toshiro Ishiyama, Yoshiyuki Shimizu, Kiyoshi Hayashi | 1997-09-16 |
| 5592329 | Catadioptric optical system | Toshiro Ishiyama | 1997-01-07 |
| 5589988 | Retrofocus-type wide angle lens system having a fixed front lens group and a movable rear lens group | — | 1996-12-31 |
| 5532878 | Objective lens system for microscope | Itoe Hayashi | 1996-07-02 |
| 5477388 | Inverse telescopic wide angle lens | Toshiro Ishiyama, Yoshiyuki Shimizu | 1995-12-19 |
| 5220454 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Hideo Mizutani, Sumio Hashimoto | 1993-06-15 |
| 4798962 | Multi-wavelength projection exposure and alignment apparatus | Koichi Matsumoto, Makoto Uehara, Kiyoyuki Muramatsu | 1989-01-17 |
| 4795244 | Projection type exposure apparatus | Makoto Uehara, Koichi Matsumoto, Kiyoyuki Muramatsu | 1989-01-03 |
| 4723845 | Optical apparatus for the detection of position | Hideo Mizutani | 1988-02-09 |
| 4626079 | Dark field illumination apparatus for epi-illumination system | Eiji Nakamura | 1986-12-02 |