Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4798962 | Multi-wavelength projection exposure and alignment apparatus | Koichi Matsumoto, Yutaka Suenaga, Makoto Uehara | 1989-01-17 |
| 4795244 | Projection type exposure apparatus | Makoto Uehara, Koichi Matsumoto, Yutaka Suenaga | 1989-01-03 |
| 4730900 | Projection optical apparatus | Makoto Uehara, Hideo Mizutani, Takeshi Asami, Akikazu Tanimoto | 1988-03-15 |