Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689339 | Alignment apparatus | Kazuya Ota, Hideo Mizutani, Nobutaka Magome | 1997-11-18 |
| 5506684 | Projection scanning exposure apparatus with synchronous mask/wafer alignment system | Kazuya Ota | 1996-04-09 |
| 5184196 | Projection exposure apparatus | Masahiro Nakagawa, Hideo Mizutani, Yawara Nojima | 1993-02-02 |