Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5572325 | Apparatus for optically detecting a position of mark | Masashi Tanaka | 1996-11-05 |
| 5568257 | Adjusting device for an alignment apparatus | Kazuya Ota, Hideo Mizutani | 1996-10-22 |
| 5489986 | Position detecting apparatus | Nobutaka Magome, Kazuya Ota, Hideo Mizutani | 1996-02-06 |
| 5483348 | Apparatus for optically detecting a position of a mark | Masashi Tanaka | 1996-01-09 |
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Kazuya Ota, Nobutaka Magome, Hideo Mizutani | 1994-09-13 |
| 5151750 | Alignment apparatus | Nobutaka Magome, Kazuya Ota, Hideo Mizutani | 1992-09-29 |
| 5118953 | Substrate alignment apparatus using diffracted and reflected radiation beams | Kazuya Ota, Nobutaka Magome, Hideo Mizutani | 1992-06-02 |