Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5204535 | Alignment device having irradiation and detection light correcting optical elements | — | 1993-04-20 |
| 5184196 | Projection exposure apparatus | Masahiro Nakagawa, Kouichirou Komatsu, Yawara Nojima | 1993-02-02 |
| 5171999 | Adjustable beam and interference fringe position | Koichiro Komatsu, Nobutaka Magome, Kazuya Ota | 1992-12-15 |
| 5151750 | Alignment apparatus | Nobutaka Magome, Kazuya Ota, Kouichiro Komatsu | 1992-09-29 |
| 5118953 | Substrate alignment apparatus using diffracted and reflected radiation beams | Kazuya Ota, Nobutaka Magome, Kouichiro Komatsu | 1992-06-02 |
| 5070250 | Position detection apparatus with adjustable beam and interference fringe positions | Koichiro Komatsu, Nobutaka Magome, Kazuya Ota | 1991-12-03 |
| 4902900 | Device for detecting the levelling of the surface of an object | Saburo Kamiya | 1990-02-20 |
| 4864123 | Apparatus for detecting the level of an object surface | Isao Sato, Masato Shibuya | 1989-09-05 |
| 4801977 | Projection optical apparatus | Shoji Ishizaka, Susumu Makinouchi, Akikazu Tanimoto | 1989-01-31 |
| 4780747 | Projection exposure apparatus | Kazuaki Suzuki, Hidemi Kawai | 1988-10-25 |
| 4748333 | Surface displacement sensor with opening angle control | Shoji Ishizaka, Takeshi Suto | 1988-05-31 |
| 4730900 | Projection optical apparatus | Makoto Uehara, Kiyoyuki Muramatsu, Takeshi Asami, Akikazu Tanimoto | 1988-03-15 |
| 4723845 | Optical apparatus for the detection of position | Yutaka Suenaga | 1988-02-09 |
| 4641964 | Apparatus for measuring optical characteristics of optical systems | Kiyoharu Mitani, Kazuo Morohashi, Kenji Yamada, Tsunemi Gonda | 1987-02-10 |
| 4315206 | Current supply circuit for telephone exchange | Michio Tokunaga, Ryoichi Okada, Koichi Hasegawa, Takaaki Osaki | 1982-02-09 |