Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8996422 | Substrate processing system, method of confirmation of its state of use, and method of prevention of illicit use | Hiroyuki Suzuki, Tadashi Yamaguchi | 2015-03-31 |
| 8982320 | Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection system | — | 2015-03-17 |
| 8566756 | Processing condition determining method and apparatus, display method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, substrate processing system, and program and information recording medium | — | 2013-10-22 |
| 8355113 | Exposure apparatus, exposure method and device manufacturing method | — | 2013-01-15 |
| 8159650 | Device manufacturing method, device manufacturing system, and measurement/inspection apparatus | Koji Yasukawa | 2012-04-17 |
| 8134681 | Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium | — | 2012-03-13 |
| 8090875 | Device and method for connecting device manufacturing processing apparatuses, program, device manufacturing processing system, exposure apparatus and method, and measurement and inspection apparatus and method | — | 2012-01-03 |
| 7941232 | Control method, control system, and program | Yuuki Ishii | 2011-05-10 |
| 7855784 | Substrate processing method, substrate processing system, program, and recording medium | — | 2010-12-21 |
| 7838858 | Evaluation system and method of a search operation that detects a detection subject on an object | — | 2010-11-23 |
| 7746446 | Alignment condition determination method and apparatus of the same, and exposure method and apparatus of the same | — | 2010-06-29 |
| 7718327 | Overlay management method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, device manufacturing system and device manufacturing method, and program and information recording medium | — | 2010-05-18 |
| 7688436 | Measuring and/or inspecting method, measuring and/or inspecting apparatus, exposure method, device manufacturing method, and device manufacturing apparatus | — | 2010-03-30 |
| 7593100 | Measuring method, measuring system, inspecting method, inspecting system, exposure method and exposure system, in which information as to the degree of the flatness of an object is pre-obtained | — | 2009-09-22 |
| 6992751 | Scanning exposure apparatus | Tsuneyuki Hagiwara | 2006-01-31 |
| 6538721 | Scanning exposure apparatus | Tsuneyuki Hagiwara | 2003-03-25 |
| 5479537 | Image processing method and apparatus | Muneki Hamashima | 1995-12-26 |