Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5568257 | Adjusting device for an alignment apparatus | Hideo Mizutani, Kouichiro Komatsu | 1996-10-22 |
| 5561606 | Method for aligning shot areas on a substrate | Masaharu Kawakubo, Kenji Nishi | 1996-10-01 |
| 5530256 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Hideo Mizutani | 1996-06-25 |
| 5530257 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Hideo Mizutani | 1996-06-25 |
| 5506684 | Projection scanning exposure apparatus with synchronous mask/wafer alignment system | Kouichirou Komatsu | 1996-04-09 |
| 5489986 | Position detecting apparatus | Nobutaka Magome, Hideo Mizutani, Kouichiro Komatsu | 1996-02-06 |
| 5488230 | Double-beam light source apparatus, position detecting apparatus and aligning apparatus | Hideo Mizutani | 1996-01-30 |
| 5477309 | Alignment apparatus | Hiroki Okamoto | 1995-12-19 |
| 5459003 | Exposure method for forming sloping sidewalls in photoresists | — | 1995-10-17 |
| H1463 | Method for detecting positions of photomask and substrate | — | 1995-07-04 |
| 5416562 | Method of detecting a position and apparatus therefor | Hideo Mizutani | 1995-05-16 |
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Nobutaka Magome, Hideo Mizutani, Kouichiro Komatsu | 1994-09-13 |
| 5171999 | Adjustable beam and interference fringe position | Koichiro Komatsu, Hideo Mizutani, Nobutaka Magome | 1992-12-15 |
| 5160849 | Diffraction-type displacement detector for alignment of mask and wafer | Nobutaka Magome | 1992-11-03 |
| 5153678 | Method of determining regularity of a pattern array to enable positioning of patterns thereof relative to a reference position | — | 1992-10-06 |
| 5151750 | Alignment apparatus | Nobutaka Magome, Hideo Mizutani, Kouichiro Komatsu | 1992-09-29 |
| 5118953 | Substrate alignment apparatus using diffracted and reflected radiation beams | Nobutaka Magome, Hideo Mizutani, Kouichiro Komatsu | 1992-06-02 |
| 5070250 | Position detection apparatus with adjustable beam and interference fringe positions | Koichiro Komatsu, Hideo Mizutani, Nobutaka Magome | 1991-12-03 |