Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360394 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Katsushi Nakano, Satoshi Takahashi | 2022-06-14 |
| 10942457 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Katsushi Nakano, Satoshi Takahashi | 2021-03-09 |
| 10642159 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Katsushi Nakano, Satoshi Takahashi | 2020-05-05 |
| 9720332 | Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium | Katsushi Nakano, Satoshi Takahashi | 2017-08-01 |