Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085381 | Cleanup method for optics in immersion lithography using sonic device | Hidemi Kawai, Douglas C. Watson | 2011-12-27 |
| 7522259 | Cleanup method for optics in immersion lithography | Andrew J. Hazelton, Hidemi Kawai, Douglas C. Watson | 2009-04-21 |