Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888620 | System and method for holding a device with minimal deformation | Martin E. Lee, Mike Binnard | 2005-05-03 |
| 6880942 | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system | Andrew J. Hazelton, W. Thomas Novak, Alton H. Phillips | 2005-04-19 |
| 6882126 | Holder mover for a stage assembly | Mike Binnard, Andrew J. Hazelton, Martin E. Lee | 2005-04-19 |
| 6873478 | Kinematic lens mount with reduced clamping force | — | 2005-03-29 |
| 6842226 | Flexure supported wafer table | Michael Binnard | 2005-01-11 |
| 6842277 | Deformable mirror with high-bandwidth servo for rigid body control | — | 2005-01-11 |
| 6840638 | Deformable mirror with passive and active actuators | — | 2005-01-11 |
| 6815695 | Simplified reticle stage removal system for an electron beam system | W. Thomas Novak | 2004-11-09 |
| 6794660 | Long stroke mover for a stage assembly | — | 2004-09-21 |
| 6774981 | Modular exposure apparatus with removable optical device and improved isolation of the optical device | Alton H. Phillips | 2004-08-10 |
| 6756706 | Method and apparatus for cooling power supply wires used to drive stages in electron beam lithography machines | — | 2004-06-29 |
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2004-05-18 |
| 6734947 | Quick chamber seals | Michael Binnard | 2004-05-11 |
| 6731372 | Multiple chamber fluid mount | Mike Binnard | 2004-05-04 |
| 6666611 | Three degree of freedom joint | Alton H. Phillips | 2003-12-23 |
| 6648509 | Friction-drive stage | — | 2003-11-18 |
| 6639654 | Wafer stage carrier and removal assembly | Michael Binnard | 2003-10-28 |
| 6600547 | Sliding seal | Alton H. Phillips | 2003-07-29 |
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2002-12-31 |
| 6467960 | Air bearing linear guide for use in a vacuum | W. Thomas Novak | 2002-10-22 |
| 6408767 | Low stiffness suspension for a stage | Mike Binnard | 2002-06-25 |
| 6281655 | High performance stage assembly | Alex Ka Tim Poon | 2001-08-28 |
| 6239924 | Kinematic lens mounting with distributed support and radial flexure | W. Thomas Novak | 2001-05-29 |
| 5959427 | Method and apparatus for compensating for reaction forces in a stage assembly | — | 1999-09-28 |
| 5519223 | Apparatus and method for automated collimator exchange | Paul Hug, Mark S. Fasnacht, Horace H. Hines, David A. Chan | 1996-05-21 |