Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11788833 | Determination of customized components for fitting wafer profile | Henry Pang, Fardad Hashemi | 2023-10-17 |
| 10990024 | Lithographic thermal distortion compensation with the use of machine learning | Fardad Hashemi, Henry Pang | 2021-04-27 |
| 10718606 | Determination of customized components for fitting wafer profile | Henry Pang, Fardad Hashemi | 2020-07-21 |
| 10444643 | Lithographic thermal distortion compensation with the use of machine learning | Fardad Hashemi, Henry Pang | 2019-10-15 |
| 10371920 | Mirror assembly with heat transfer mechanism | Christopher S. Margeson | 2019-08-06 |
| 10259104 | Precision clamp | Fardad Hashemi, Patrick Shih Chang | 2019-04-16 |
| 8937289 | High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system | Douglas C. Watson | 2015-01-20 |