Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646719 | Support assembly for an exposure apparatus | Martin E. Lee, Yutaka Hayashi | 2003-11-11 |
| 6590639 | Active vibration isolation system having pressure control | Michael Binnard, Martin E. Lee | 2003-07-08 |
| 6509953 | Apparatus for exposing a pattern onto an object with controlled scanning | Kazuaki Saiki | 2003-01-21 |
| 6486941 | Guideless stage | Andrew J. Hazelton | 2002-11-26 |
| 6472777 | Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators | Ting-Chien Teng | 2002-10-29 |
| 6320345 | Command trajectory for driving a stage with minimal vibration | Kazuaki Saiki, Henry K. Chau | 2001-11-20 |
| 6287735 | Method and apparatus for controlling the leveling table of a wafer stage | — | 2001-09-11 |
| 6285438 | Scanning exposure method with reduced time between scans | Andrew J. Hazelton | 2001-09-04 |
| 6260282 | Stage control with reduced synchronization error and settling time | Susumu Makinouchi, Hideyaki Hashimoto | 2001-07-17 |
| 6130517 | Magnetic actuator producing large acceleration on fine stage and low RMS power gain | Ting-Chien Teng | 2000-10-10 |
| 6069417 | Stage having paired E/I core actuator control | Ting-Chien Teng | 2000-05-30 |
| 6008610 | Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system | Kazuaki Saiki | 1999-12-28 |
| 5940789 | Stage control method and apparatus with varying stage controller parameter | — | 1999-08-17 |
| 5777403 | Voice coil motor with air guide and air bellows | — | 1998-07-07 |