Akimitsu Ebihara has been granted 53 US patents while listed as an inventor at Nikon . The first was granted in 1997 and the most recent in January 2019. Akimitsu Ebihara ranks #48,528 of 4,157,543 US inventors in our database (top 1.2%). Patent records list Akimitsu Ebihara in Fukaya, CA, JP.
Patents per Year Patents granted per year, 1997 to 2019 Bar chart with a peak of 10 patents in 2014. peak 10 1997: 1 patents 1997 1998: 2 patents 1999: 1 patents 2000: 1 patents 2000 2001: 7 patents 2002: 4 patents 2004: 2 patents 2004 2005: 3 patents 2006: 1 patents 2008: 1 patents 2008 2009: 2 patents 2010: 2 patents 2011: 2 patents 2011 2012: 1 patents 2013: 4 patents 2014: 10 patents 2014 2015: 4 patents 2016: 1 patents 2017: 2 patents 2017 2018: 1 patents 2019: 1 patents 2019
Issued Patents All Time
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Showing 1–25 of 53 patents
Patent # Title Co-Inventors Date
10191388 Exposure apparatus, and device manufacturing method — 2019-01-29
10007188 Exposure apparatus and device manufacturing method — 2018-06-26
9810995 Exposure apparatus and device manufacturing method — 2017-11-07
9551943 Exposure apparatus and device manufacturing method — 2017-01-24
9274437 Exposure apparatus and device manufacturing method — 2016-03-01
9025129 Exposure apparatus, and device manufacturing method — 2015-05-05
9019473 Exposure apparatus and device manufacturing method — 2015-04-28
9001307 Exposure apparatus and device manufacturing method — 2015-04-07
8953148 Exposure apparatus and making method thereof — 2015-02-10
8830445 Exposure apparatus, and device manufacturing method — 2014-09-09
8796905 Motor device, method of manufacturing motor device, and robot device Takashi Nagase , Masashi Okada 2014-08-05
8767177 Exposure apparatus, and device manufacturing method — 2014-07-01
8767172 Projection optical device and exposure apparatus Martin E. Lee , Bausan Yuan 2014-07-01
8724085 Exposure apparatus, and device manufacturing method — 2014-05-13
8717537 Exposure apparatus, and device manufacturing method — 2014-05-06
8705001 Exposure apparatus, and device manufacturing method — 2014-04-22
8692976 Exposure apparatus, and device manufacturing method — 2014-04-08
8681314 Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method Masato Takahashi 2014-03-25
8674586 Motor device, apparatus and driving method for rotor — 2014-03-18
8441171 Motor device, method of manufacturing motor device, and robot device Masashi Okada 2013-05-14
8436978 Exposure apparatus, and device manufacturing method — 2013-05-07
8436981 Exposing method, exposure apparatus, and device fabricating method — 2013-05-07
8436979 Exposure apparatus, and device manufacturing method — 2013-05-07
8319941 Exposure apparatus, and device manufacturing method — 2012-11-27
8027027 Exposure apparatus, and device manufacturing method — 2011-09-27