Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191388 | Exposure apparatus, and device manufacturing method | — | 2019-01-29 |
| 10007188 | Exposure apparatus and device manufacturing method | — | 2018-06-26 |
| 9810995 | Exposure apparatus and device manufacturing method | — | 2017-11-07 |
| 9551943 | Exposure apparatus and device manufacturing method | — | 2017-01-24 |
| 9274437 | Exposure apparatus and device manufacturing method | — | 2016-03-01 |
| 9025129 | Exposure apparatus, and device manufacturing method | — | 2015-05-05 |
| 9019473 | Exposure apparatus and device manufacturing method | — | 2015-04-28 |
| 9001307 | Exposure apparatus and device manufacturing method | — | 2015-04-07 |
| 8953148 | Exposure apparatus and making method thereof | — | 2015-02-10 |
| 8830445 | Exposure apparatus, and device manufacturing method | — | 2014-09-09 |
| 8796905 | Motor device, method of manufacturing motor device, and robot device | Takashi Nagase, Masashi Okada | 2014-08-05 |
| 8767177 | Exposure apparatus, and device manufacturing method | — | 2014-07-01 |
| 8767172 | Projection optical device and exposure apparatus | Martin E. Lee, Bausan Yuan | 2014-07-01 |
| 8724085 | Exposure apparatus, and device manufacturing method | — | 2014-05-13 |
| 8717537 | Exposure apparatus, and device manufacturing method | — | 2014-05-06 |
| 8705001 | Exposure apparatus, and device manufacturing method | — | 2014-04-22 |
| 8692976 | Exposure apparatus, and device manufacturing method | — | 2014-04-08 |
| 8681314 | Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method | Masato Takahashi | 2014-03-25 |
| 8674586 | Motor device, apparatus and driving method for rotor | — | 2014-03-18 |
| 8441171 | Motor device, method of manufacturing motor device, and robot device | Masashi Okada | 2013-05-14 |
| 8436978 | Exposure apparatus, and device manufacturing method | — | 2013-05-07 |
| 8436981 | Exposing method, exposure apparatus, and device fabricating method | — | 2013-05-07 |
| 8436979 | Exposure apparatus, and device manufacturing method | — | 2013-05-07 |
| 8319941 | Exposure apparatus, and device manufacturing method | — | 2012-11-27 |
| 8027027 | Exposure apparatus, and device manufacturing method | — | 2011-09-27 |