Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7012398 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2006-03-14 |
| 6969966 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2005-11-29 |
| 6844695 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2005-01-18 |
| 6844696 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2005-01-18 |
| 6693402 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2004-02-17 |
| 6373153 | Stage device, and exposure apparatus with linear motor having polygonal shaped coil units | Andrew J. Hazelton | 2002-04-16 |
| 6329780 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-12-11 |
| 6323935 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-11-27 |
| 6255795 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-07-03 |
| 6255796 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-07-03 |
| 6252370 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-06-26 |
| 6246204 | Electromagnetic alignment and scanning apparatus | Akimitsu Ebihara | 2001-06-12 |