Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018575 | Exposure apparatus, and device manufacturing method | — | 2011-09-13 |
| 7812925 | Exposure apparatus, and device manufacturing method | — | 2010-10-12 |
| RE41232 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, W. Thomas Novak | 2010-04-20 |
| 7573225 | Electromagnetic alignment and scanning apparatus | — | 2009-08-11 |
| 7486385 | Exposure apparatus, and device manufacturing method | — | 2009-02-03 |
| 7321419 | Exposure apparatus, and device manufacturing method | — | 2008-01-22 |
| 7012398 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2006-03-14 |
| 6969966 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2005-11-29 |
| 6844695 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2005-01-18 |
| 6844696 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2005-01-18 |
| 6693402 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2004-02-17 |
| 6677691 | Stage apparatus and method of using the same | — | 2004-01-13 |
| 6437463 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, W. Thomas Novak | 2002-08-20 |
| 6396589 | Apparatus and method for measuring three-dimensional shape of object | — | 2002-05-28 |
| 6391503 | Scanning exposure methods | — | 2002-05-21 |
| 6363809 | Precision scanning apparatus and method with fixed and movable guide members | W. Thomas Novak, Zahirudeen Premji, Uday Nayak | 2002-04-02 |
| 6329780 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-12-11 |
| 6323935 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-11-27 |
| 6281643 | Stage apparatus | — | 2001-08-28 |
| 6255795 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-07-03 |
| 6255796 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-07-03 |
| 6252370 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-06-26 |
| 6246204 | Electromagnetic alignment and scanning apparatus | Thomas Novak | 2001-06-12 |
| 6134981 | Precision scanning apparatus and method with fixed and movable guide members | W. Thomas Novak, Zahirudeen Premji, Uday Nayak | 2000-10-24 |
| 5996437 | Precision motion stage with single guide beam and follower stage | W. Thomas Novak, Zahirudeen Premji, Uday Nayak | 1999-12-07 |