| 11016038 |
Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure |
Nobukatsu MACHII, Akitoshi Kawai |
2021-05-25 |
| 11016039 |
Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure |
Nobukatsu MACHII, Akitoshi Kawai |
2021-05-25 |
| 10809209 |
Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method |
Hirotomo Yashima, Akitoshi Kawai |
2020-10-20 |
| 10760902 |
Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program |
Nobukatsu MACHII, Akitoshi Kawai |
2020-09-01 |
| 10557706 |
Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program |
Nobukatsu MACHII, Akitoshi Kawai |
2020-02-11 |
| 10481106 |
Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method |
Hirotomo Yashima, Akitoshi Kawai |
2019-11-19 |
| 8269969 |
Surface inspection device and surface inspection method |
— |
2012-09-18 |
| 8115916 |
Surface inspecting method and surface inspecting apparatus |
— |
2012-02-14 |
| 7218399 |
Method and apparatus for measuring optical overlay deviation |
— |
2007-05-15 |
| 5719405 |
Particle inspecting apparatus and method using fourier transform |
— |
1998-02-17 |
| 5663569 |
Defect inspection method and apparatus, and defect display method |
— |
1997-09-02 |
| 5623340 |
Foreign particle inspection apparatus |
Kenji Yamamoto, Tsuneyuki Hagiwara, Hideyuki Tashiro |
1997-04-22 |
| 5473426 |
Defect inspection apparatus |
Hitoshi Hamada, Hideyuki Tashiro |
1995-12-05 |
| 5436464 |
Foreign particle inspecting method and apparatus with correction for pellicle transmittance |
Hideyuki Tashiro, Tsuneyuki Hagiwara, Hajime Moriya |
1995-07-25 |
| 5363187 |
Light scanning apparatus for detecting foreign particles on surface having circuit pattern |
Tsuneyuki Hagiwara |
1994-11-08 |
| 5149982 |
Foreign particle inspection apparatus |
Tsuneyuki Hagiwara |
1992-09-22 |
| 5072128 |
Defect inspecting apparatus using multiple color light to detect defects |
Sunao Murata |
1991-12-10 |
| 4999510 |
Apparatus for detecting foreign particles on a surface of a reticle or pellicle |
Kazunori Imamura, Sunao Murata, Kinya Kato |
1991-03-12 |
| 4966457 |
Inspecting apparatus for determining presence and location of foreign particles on reticles or pellicles |
Kazunori Imamura, Sunao Murata |
1990-10-30 |
| 4889998 |
Apparatus with four light detectors for checking surface of mask with pellicle |
Kazunori Imamura, Sunao Murata, Kinya Kato |
1989-12-26 |
| 4803373 |
Conveyor arm apparatus with gap detection |
Kazunori Imamura, Yukio Kakizaki, Jiro Kobayashi |
1989-02-07 |