Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5016586 | Apparatus for controlling a throttle valve | Yoshikazu Hoshi | 1991-05-21 |
| 4999510 | Apparatus for detecting foreign particles on a surface of a reticle or pellicle | Fuminori Hayano, Sunao Murata, Kinya Kato | 1991-03-12 |
| 4966457 | Inspecting apparatus for determining presence and location of foreign particles on reticles or pellicles | Fuminori Hayano, Sunao Murata | 1990-10-30 |
| 4908517 | Apparatus for examining the surface of a substrate | — | 1990-03-13 |
| 4889998 | Apparatus with four light detectors for checking surface of mask with pellicle | Fuminori Hayano, Sunao Murata, Kinya Kato | 1989-12-26 |
| 4833051 | Protective device for photographic masks | — | 1989-05-23 |
| 4803373 | Conveyor arm apparatus with gap detection | Fuminori Hayano, Yukio Kakizaki, Jiro Kobayashi | 1989-02-07 |
| 4776693 | Foreign substance inspecting system including a calibration standard | Akikazu Tanimoto, Yukio Kakizaki | 1988-10-11 |
| 4715392 | Automatic photomask or reticle washing and cleaning system | Nobutoshi Abe | 1987-12-29 |
| 4690528 | Projection exposure apparatus | Akikazu Tanimoto | 1987-09-01 |
| 4666292 | Projection optical apparatus and a photographic mask therefor | Yoshio Mori | 1987-05-19 |
| 4610541 | Foreign substance inspecting apparatus | Akikazu Tanimoto | 1986-09-09 |
| 4568835 | Apparatus for detecting foreign matters on a planar substrate | Akikazu Tanimoto, Nobutoshi Abe | 1986-02-04 |
| 4468120 | Foreign substance inspecting apparatus | Akikazu Tanimoto | 1984-08-28 |