Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4715392 | Automatic photomask or reticle washing and cleaning system | Kazunori Imamura | 1987-12-29 |
| 4568835 | Apparatus for detecting foreign matters on a planar substrate | Kazunori Imamura, Akikazu Tanimoto | 1986-02-04 |
| 4422547 | Container for holding substrate | Yukio Kakizaki, Jiro Kobayashi | 1983-12-27 |