Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7368209 | Method for evaluating sensitivity of photoresist, method for preparation of photoresist and manufacturing method of semiconductor device | Kei Hayasaki, Tadahito Fujisawa, Shinichi Ito | 2008-05-06 |
| 7294586 | Method of processing a substrate, heating apparatus, and method of forming a pattern | Kenji Kawano, Shinichi Ito | 2007-11-13 |
| 7026099 | Pattern forming method and method for manufacturing semiconductor device | Hirokazu Kato, Yasunobu Onishi, Daisuke Kawamura, Hiroko Nakamura | 2006-04-11 |
| 7009148 | Method of processing a substrate, heating apparatus, and method of forming a pattern | Kenji Kawano, Shinichi Ito | 2006-03-07 |
| 7005238 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Daisuke Kawamura, Kei Hayasaki | 2006-02-28 |
| 7005249 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Daisuke Kawamura, Kei Hayasaki | 2006-02-28 |
| 6881058 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Daisuke Kawamura, Kei Hayasaki | 2005-04-19 |
| 6841404 | Method for determining optical constant of antireflective layer, and method for forming resist pattern | Daisuke Kawamura | 2005-01-11 |
| 6576562 | Manufacturing method of semiconductor device using mask pattern having high etching resistance | Junko Ohuchi, Yasuhiko Sato, Hisataka Hayashi, Tokuhisa Ohiwa, Yasunobu Onishi | 2003-06-10 |
| 6569595 | Method of forming a pattern | Yasuhiko Sato, Yasunobu Onishi, Shuji Hayase, Yoshihiko Nakano | 2003-05-27 |
| 6420271 | Method of forming a pattern | Yasuhiko Sato, Motoyuki Sato, Yasunobu Onishi, Hiroshi Tomita, Tokuhisa Ohiwa +2 more | 2002-07-16 |
| 6270948 | Method of forming pattern | Yasuhiko Sato, Yoshihiko Nakano, Rikako Kani, Shuji Hayase, Yasunobu Onishi +4 more | 2001-08-07 |