Issued Patents All Time
Showing 26–50 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620815 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Toru Watanabe, Katsuya Okumura | 1997-04-15 |
| 5607718 | Polishing method and polishing apparatus | Yasutaka Sasaki, Mie Matsuo, Rempei Nakata, Junichi Wada, Nobuo Hayasaka +1 more | 1997-03-04 |
| 5597341 | Semiconductor planarizing apparatus | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima | 1997-01-28 |
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Sadahisa Noguchi, Makoto Sekine | 1997-01-07 |
| 5582640 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 1996-12-10 |
| 5561082 | Method for forming an electrode and/or wiring layer by reducing copper oxide or silver oxide | Mie Matsuo, Nobuo Hayasaka, Kyoichi Suguro, Hideshi Miyajima, Jun Wada | 1996-10-01 |
| 5547787 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Toru Watanabe, Katsuya Okumura | 1996-08-20 |
| 5514904 | Semiconductor device with monocrystalline gate insulating film | Shinji Onga, Takako Okada, Kouichirou Inoue, Yoshiaki Matsushita, Kikuo Yamabe +1 more | 1996-05-07 |
| 5514425 | Method of forming a thin film | Hitoshi Ito, Kyoichi Suguro, Nobuo Hayasaka, Shinji Himori, Kazuya Nagaseki +1 more | 1996-05-07 |
| 5503901 | Surface treatment method and surface treatment apparatus | Takayuki Sakai, Hisataka Hayashi, Shigeyuki Takagi, Yutaka Uchida | 1996-04-02 |
| 5491339 | Charged particle detection device and charged particle radiation apparatus | Tadashi Mitsui, Nozomu Harada, Motosuke Miyoshi, Makoto Sekine, Katsuya Okumura | 1996-02-13 |
| 5474643 | Plasma processing apparatus | Junichi Arami, Tamio Endo, Shiro Koyama, Kazuo Kikuchi, Teruaki Shiraishi +3 more | 1995-12-12 |
| 5470791 | Method of manufacturing semiconductor device | Kyoichi Suguro | 1995-11-28 |
| 5466942 | Charged beam irradiating apparatus having a cleaning means and a method of cleaning a charged beam irradiating apparatus | Itsuko Sakai, Nobuo Hayasaka | 1995-11-14 |
| 5458919 | Method for forming a film on a substrate by activating a reactive gas | Sadahisa Noguchi | 1995-10-17 |
| 5445996 | Method for planarizing a semiconductor device having a amorphous layer | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima | 1995-08-29 |
| 5445710 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo +3 more | 1995-08-29 |
| 5444207 | Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field | Makoto Sekine, Keiji Horioka, Katsuya Okumura, Isahiro Hasegawa, Masaki Narita | 1995-08-22 |
| 5440157 | Semiconductor integrated-circuit capacitor having a carbon film electrode | Keitaro Imai, Tomonori Aoyama, Yasunori Okayama | 1995-08-08 |
| 5437961 | Method of manufacturing semiconductor device | Hiroyuki Yano, Tohru Watanabe, Keiji Horioka | 1995-08-01 |
| 5429995 | Method of manufacturing silicon oxide film containing fluorine | Yukio Nishiyama, Rempei Nakata, Nobuo Hayasaka, Riichirou Aoki, Takahito Nagamatsu +3 more | 1995-07-04 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1995-07-04 |
| 5424246 | Method of manufacturing semiconductor metal wiring layer by reduction of metal oxide | Mie Matsuo, Nobuo Hayasaka, Kyoichi Suguro, Hideshi Miyajima, Jun Wada | 1995-06-13 |
| 5413967 | Method of manufacturing semiconductor devices | Tetsuo Matsuda | 1995-05-09 |
| 5413663 | Plasma processing apparatus | Masahiro Shimizu, Takayuki Fukasawa, Yuichiro Yamazaki, Motosuke Miyoshi, Katsuya Okumura | 1995-05-09 |