Issued Patents All Time
Showing 76–90 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5030319 | Method of oxide etching with condensed plasma reaction product | Hirotaka Nishino, Nobuo Hayasaka | 1991-07-09 |
| 4878995 | Method of dry etching and apparatus for use in such method | Tsunetoshi Arikado, Makoto Sekine, Yasuhiro Horiike | 1989-11-07 |
| 4844774 | Phototreating method and apparatus therefor | Makoto Sekine, Yasuhiro Horiike | 1989-07-04 |
| 4838978 | Dry etching apparatus | Makoto Sekine, Tsunetoshi Arikado, Yasuhiro Horiike | 1989-06-13 |
| 4786361 | Dry etching process | Makoto Sekine, Yasuhiro Horiike | 1988-11-22 |
| 4698238 | Pattern-forming method | Nobuo Hayasaka, Yasuhiro Horiike | 1987-10-06 |
| 4668337 | Dry-etching method and apparatus therefor | Makoto Sekine, Yasuhiro Horiike | 1987-05-26 |
| 4642171 | Phototreating apparatus | Makoto Sekine, Yasuhiro Horiike | 1987-02-10 |
| 4600492 | Magnet driving method and device for same | Hirosuke Ooshio, Tetsuo Aikawa, Hidetaka Jo, Takashi Yamazaki | 1986-07-15 |
| 4595601 | Method of selectively forming an insulation layer | Keiji Horioka, Makoto Sekine | 1986-06-17 |
| 4529475 | Dry etching apparatus and method using reactive gases | Yasuhiro Horiike, Makoto Sekine | 1985-07-16 |
| 4526643 | Dry etching apparatus using reactive ions | Takashi Yamazaki, Yasuhiro Horiike, Hiromichi Horie | 1985-07-02 |
| 4492610 | Dry Etching method and device therefor | Yasuhiro Horiike | 1985-01-08 |
| 4431473 | RIE Apparatus utilizing a shielded magnetron to enhance etching | Yasuhiro Horiike | 1984-02-14 |
| 4277304 | Ion source and ion etching process | Yasuhiro Horiike, Masahiro Shibagaki, Katsuo Kadono | 1981-07-07 |