Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4645218 | Electrostatic chuck | Osamu Watanabe | 1987-02-24 |
| 4600492 | Magnet driving method and device for same | Tetsuo Aikawa, Hidetaka Jo, Haruo Okano, Takashi Yamazaki | 1986-07-15 |