Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4252595 | Etching apparatus using a plasma | Shinichi Yamamoto, Yasuhiro Horiike, Masahiro Shibagaki | 1981-02-24 |
| 4216491 | Semiconductor integrated circuit isolated through dielectric material | Takashi Matsuda, Kazuo Niwa | 1980-08-05 |
| 4185294 | Semiconductor device and a method for manufacturing the same | Yoshie Ohashi | 1980-01-22 |