Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE37622 | Wafer polishing method and apparatus | Chris Karlsrud, Shigeru Odagiri, Isao Nagahashi | 2002-04-02 |
| 5498196 | Wafer polishing method and apparatus | Chris Karlsrud, Shigeru Odagiri, Isao Nagahashi | 1996-03-12 |
| 5498199 | Wafer polishing method and apparatus | Chris Karlsrud, Shigeru Odagiri, Isao Nagahashi, Spencer Preston | 1996-03-12 |
| 5486131 | Device for conditioning polishing pads | Joseph V. Cesna | 1996-01-23 |
| 5329732 | Wafer polishing method and apparatus | Chris Karlsrud, Shigeru Odagiri, Isao Nagahashi | 1994-07-19 |