Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6238271 | Methods and apparatus for improved polishing of workpieces | — | 2001-05-29 |
| 6168683 | Apparatus and method for the face-up surface treatment of wafers | — | 2001-01-02 |
| 6142857 | Wafer polishing with improved backing arrangement | — | 2000-11-07 |
| 6102779 | Method and apparatus for improved semiconductor wafer polishing | Inki Kim | 2000-08-15 |
| 6089961 | Wafer polishing carrier and ring extension therefor | Inki Kim | 2000-07-18 |
| 5993293 | Method and apparatus for improved semiconductor wafer polishing | Inki Kim | 1999-11-30 |
| 5972162 | Wafer polishing with improved end point detection | — | 1999-10-26 |
| 5951370 | Method and apparatus for monitoring and controlling the flatness of a polishing pad | — | 1999-09-14 |
| 5938506 | Methods and apparatus for conditioning grinding stones | Clinton O. Fruitman, Philbin Scott | 1999-08-17 |
| 5868605 | In-situ polishing pad flatness control | — | 1999-02-09 |
| 5803798 | Dual column abrading machine | Lawrence O. Day | 1998-09-08 |
| 5791975 | Backing pad | Chris Karlsrud, Spencer Preston | 1998-08-11 |
| 5791978 | Bearing assembly for wafer planarization carrier | Gordon J. Grosslight, Chris Karlsrud | 1998-08-11 |
| 5782678 | Dual column abrading machine | Lawrence O. Day | 1998-07-21 |
| 5595529 | Dual column abrading machine | Lawrence O. Day | 1997-01-21 |
| 5486131 | Device for conditioning polishing pads | Anthony G. Van Woerkom | 1996-01-23 |
| 5224304 | Automated free abrasive machine for one side piece part machining | — | 1993-07-06 |
| 4693012 | Measuring bar for free abrasive machines | — | 1987-09-15 |
| 4593716 | Control valve assembly for abrasive slurry | — | 1986-06-10 |
| 4519168 | Liquid waxless fixturing of microsize wafers | — | 1985-05-28 |
| 4270314 | Bearing mount for lapping machine pressure plate | — | 1981-06-02 |