Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852007 | Robotic method of transferring workpieces to and from workstations | Chris Karlsrud | 2005-02-08 |
| 6520839 | Load and unload station for semiconductor wafers | Chris Karlsrud | 2003-02-18 |
| 6390897 | Cleaning station integral with polishing machine for semiconductor wafers | Chris Karlsrud | 2002-05-21 |
| 6364745 | Mapping system for semiconductor wafer cassettes | Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-04-02 |
| 6350177 | Combined CMP and wafer cleaning apparatus and associated methods | Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-02-26 |
| 6227946 | Robot assisted method of polishing, cleaning and drying workpieces | Chris Karlsrud | 2001-05-08 |
| 6213853 | Integral machine for polishing, cleaning, rinsing and drying workpieces | Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2001-04-10 |
| 6029369 | Methods for spin drying a workpiece | Arthur Hamer, Anand Gupta | 2000-02-29 |
| 5974681 | Apparatus for spin drying a workpiece | Arthur Hamer | 1999-11-02 |