Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018365 | Semiconductor processing apparatus and a method for processing a substrate | Petri Raisanen, David Marquardt | 2024-06-25 |
| 11473195 | Semiconductor processing apparatus and a method for processing a substrate | Petri Raisanen, David Marquardt | 2022-10-18 |
| 6578287 | Substrate cooling system and method | — | 2003-06-17 |
| 6408537 | Substrate cooling system | — | 2002-06-25 |
| 6073366 | Substrate cooling system and method | — | 2000-06-13 |