Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802201 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Jung Sung-hoon, Verghese Mohith | 2014-08-12 |
| 8728832 | Semiconductor device dielectric interface layer | Michael Givens, Mohith Verghese | 2014-05-20 |
| 8383525 | Plasma-enhanced deposition process for forming a metal oxide thin film and related structures | Steven Marcus | 2013-02-26 |
| 8334218 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Steven Marcus, Glen Wilk, Kai-Erik Elers | 2012-12-18 |
| 8071452 | Atomic layer deposition of hafnium lanthanum oxides | — | 2011-12-06 |
| 7608549 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Steven Marcus, Glen Wilk, Kai-Erik Elers | 2009-10-27 |
| 7498272 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Mikko Ritala, Antti Niskanen, Markku Leskelä | 2009-03-03 |
| 6858546 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Mikko Ritala, Antti Niskanen, Markku Leskelä | 2005-02-22 |