Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847371 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Ward Johnson | 2020-11-24 |
| 10829852 | Gas distribution device for a wafer processing apparatus | Ward Johnson | 2020-11-10 |
| 10804098 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Jung Sung-hoon, Verghese Mohith | 2020-10-13 |
| 10734497 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Michael Eugene Givens | 2020-08-04 |
| 10720331 | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Michael Eugene Givens | 2020-07-21 |
| 10643904 | Methods for forming a semiconductor device and related semiconductor device structures | Qi Xie, Michael Givens, Jan Willem Maes | 2020-05-05 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Timo Asikainen +2 more | 2020-04-28 |
| 10490475 | Methods for semiconductor passivation by nitridation after oxide removal | Qi Xie, Fu Tang, Michael Eugene Givens, Jan Willem Maes, Xiaoqiang Jiang | 2019-11-26 |
| 10458018 | Structures including metal carbide material, devices including the structures, and methods of forming same | Michael Eugene Givens, Eric James Shero | 2019-10-29 |
| 10229833 | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Michael Eugene Givens | 2019-03-12 |
| 10087522 | Deposition of metal borides | Eric James Shero, Suvi Haukka, Robert Brennan Milligan, Michael Eugene Givens | 2018-10-02 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Timo Asikainen +2 more | 2018-06-19 |
| 9981286 | Selective formation of metal silicides | Jacob Woodruff, Michael Eugene Givens, Bed Prasad Sharma | 2018-05-29 |
| 9911676 | System and method for gas-phase passivation of a semiconductor surface | Fu Tang, Michael Eugene Givens, Qi Xie, Xiaoqiang Jiang, Pauline Calka | 2018-03-06 |
| 9905492 | System and method for gas-phase passivation of a semiconductor surface | Fu Tang, Michael Eugene Givens, Qi Xie | 2018-02-27 |
| 9790595 | Method and system to reduce outgassing in a reaction chamber | Sung Hoon Jung, Eric Jen Cheng Liu, Mike Schmotzer | 2017-10-17 |
| 9711350 | Methods for semiconductor passivation by nitridation | Qi Xie, Fu Tang, Michael Eugene Givens, Jan Willem Maes | 2017-07-18 |
| 9558931 | System and method for gas-phase sulfur passivation of a semiconductor surface | Fu Tang, Michael Eugene Givens, Qi Xie | 2017-01-31 |
| 9461134 | Method for forming source/drain contact structure with chalcogen passivation | Qi Xie, Fu Tang, Jacob Woodruff, Jan Willem Maes, Michael Eugene Givens | 2016-10-04 |
| 9385164 | Method of making a resistive random access memory device with metal-doped resistive switching layer | Qi Xie, Vladimir Machkaoutsan, Jan Willem Maes, Michael Eugene Givens | 2016-07-05 |
| 9177784 | Semiconductor device dielectric interface layer | Michael Givens, Mohith Verghese | 2015-11-03 |
| 8993054 | Method and system to reduce outgassing in a reaction chamber | Sung Hoon Jung, Eric Jen Cheng Liu, Mike Schmotzer | 2015-03-31 |
| 8956939 | Method of making a resistive random access memory device | Qi Xie, Vladimir Machkaoutsan, Jan Willem Maes, Michael Eugene Givens | 2015-02-17 |
| 8883270 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species | Eric James Shero, Sung Hoon Jung, Chang-Gong Wang | 2014-11-11 |
| 8877655 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Eric James Shero, Sung Hoon Jung, Chang-Gong Wang | 2014-11-04 |