Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297533 | Liquid precursor vapor pressure control | — | 2025-05-13 |
| 11791153 | Deposition of hafnium oxide within a high aspect ratio hole | Jiyeon Kim, Petri Raisanen, Sol Kim, Ying-Shen Kuo, Eric James Shero +1 more | 2023-10-17 |
| 10600673 | Magnetic susceptor to baseplate seal | — | 2020-03-24 |
| 10087525 | Variable gap hard stop design | Shawn Whaley | 2018-10-02 |