Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2019-07-09 |
| 10308673 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2019-06-04 |
| 10208379 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2019-02-19 |
| 10145009 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Mikko Ritala, Markku Leskelä | 2018-12-04 |
| 9878516 | Metamaterial thin films | Orest J. Glembocki, Sharka M. Prokes, Joshua D. Caldwell, Mikko Ritala, Markku Leskelä +3 more | 2018-01-30 |
| 9828674 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2017-11-28 |
| 9783563 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2017-10-10 |
| 9765431 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Mikko Ritala, Markku Leskelä | 2017-09-19 |
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2017-06-13 |
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2016-06-14 |
| 9315894 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Mikko Ritala, Markku Leskelä | 2016-04-19 |
| 9315896 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2016-04-19 |
| 9175390 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2015-11-03 |
| 9169557 | Process for producing oxide films | Marko Vehkamaki, Mikko Ritala, Markku Leskelä | 2015-10-27 |
| 8685165 | Metal oxide films | Antti Rahtu, Raija H. Matero, Markku Leskelä, Mikko Ritala, Timo Hanninen +1 more | 2014-04-01 |
| 8372483 | Methods for forming thin films comprising tellurium | Viljami Pore, Mikko Ritala, Markku Leskelä | 2013-02-12 |
| 7713584 | Process for producing oxide films | Marko Vehkamaki, Mikko Ritala, Markku Leskelä | 2010-05-11 |
| 7618681 | Process for producing bismuth-containing oxide films | Marko Vehkamaki, Mikko Ritala, Markku Leskelä | 2009-11-17 |
| 7108747 | Method for growing oxide thin films containing barium and strontium | Markku Leskelä, Mikko Ritala, Timo Hanninen, Marko Vehkamaki | 2006-09-19 |