Issued Patents All Time
Showing 51–67 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704716 | Deposition of smooth metal nitride films | Jaakko Anttila | 2017-07-11 |
| 9634106 | Doped metal germanide and methods for making the same | Viljami Pore, Suvi Haukka, Eva Tois | 2017-04-25 |
| 9583348 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2017-02-28 |
| 9520562 | Method of making a resistive random access memory | Qi Xie, Jan Willem Maes, Marko Tuominen, Suvi Haukka, Robin Roelofs +1 more | 2016-12-13 |
| 9514934 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2016-12-06 |
| 9472757 | Method of making a resistive random access memory device | Qi Xie, Jan Willem Maes, Marko Tuominen, Suvi Haukka, Robin Roelofs +1 more | 2016-10-18 |
| 9412602 | Deposition of smooth metal nitride films | Jaakko Anttila | 2016-08-09 |
| 9379011 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Suvi Haukka, Eva Tois | 2016-06-28 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2016-01-12 |
| 9129897 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Suvi Haukka, Eva Tois | 2015-09-08 |
| 9062390 | Crystalline strontium titanate and methods of forming the same | — | 2015-06-23 |
| 9023427 | Methods for forming multi-component thin films | Raija H. Matero | 2015-05-05 |
| 9006112 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2015-04-14 |
| 8841182 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2014-09-23 |
| 8524322 | Combination CVD/ALD method and source | — | 2013-09-03 |
| 7846499 | Method of pulsing vapor precursors in an ALD reactor | — | 2010-12-07 |
| 6672259 | Method for positioning superheaters in biomass burning steam generators, and steam generator | — | 2004-01-06 |