| 6387827 |
Method for growing thin silicon oxides on a silicon substrate using chlorine precursors |
Paul Mertens, Hessel Sprey, Karine Kenis, Marc Schaekers, Marc Heyns |
2002-05-14 |
| 5721176 |
Use of oxalyl chloride to form chloride-doped silicon dioxide films of silicon substrates |
Herman J. Boeglin |
1998-02-24 |
| 5461020 |
Dialkyl amino pyridine catalysts which are bound to inorganic matrices and processes for their preparation |
Stephen L. Goldstein, Anthony D. Hamer, Lawrence E. Katz, Curtis P. Smith |
1995-10-24 |
| 5315004 |
Process for producing uretidione dimers of isocyanates using catalysts which are bound to inorganic matrices |
Stephen L. Goldstein, Anthony D. Hamer, Lawrence E. Katz, Curtis P. Smith |
1994-05-24 |
| 5064686 |
Sub-valent molybdenum, tungsten, and chromium amides as sources for thermal chemical vapor deposition of metal-containing films |
— |
1991-11-12 |