Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761084 | Substrate processing apparatus and method of processing substrate | Hiroki Arai, Yukihiro Mori | 2023-09-19 |
| 10526704 | Film forming apparatus | Yozo Ikedo | 2020-01-07 |
| 9899291 | Method for protecting layer by forming hydrocarbon-based extremely thin film | Richika Kato, Seiji Okuro, Kunitoshi Namba, Akinori Nakano | 2018-02-20 |
| 9365924 | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power | Fumitaka Shoji, Hiroki Arai | 2016-06-14 |