Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639548 | Film-forming material mixed-gas forming device and film forming device | Hua WANG | 2023-05-02 |
| 10526704 | Film forming apparatus | Yuya Nonaka | 2020-01-07 |
| D864134 | Susceptor | Toshiharu Watarai, Takuya Suguri | 2019-10-22 |
| 10435789 | Substrate treatment apparatus | Naoto Tsuji, Takuya Suguri | 2019-10-08 |
| D829306 | Shower plate | Takafumi Hisamitsu | 2018-09-25 |
| 7691205 | Substrate-supporting device | — | 2010-04-06 |
| 7037855 | Method of forming fluorine-doped low-dielectric-constant insulating film | Naoto Tsuji, Ryu Nakano, Shuzo Hebiguchi | 2006-05-02 |