Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854498 | Wafer-supporting device and method for producing same | Hideaki Fukuda | 2020-12-01 |
| 10734219 | Plasma film forming method | — | 2020-08-04 |
| 9365924 | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power | Yuya Nonaka, Hiroki Arai | 2016-06-14 |
| 9018093 | Method for forming layer constituted by repeated stacked layers | Naoto Tsuji | 2015-04-28 |