Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7789965 | Method of cleaning UV irradiation chamber | Kiyohiro Matsushita, Hideaki Fukuda | 2010-09-07 |
| 7763869 | UV light irradiating apparatus with liquid filter | Kiyohiro Matsushita | 2010-07-27 |
| 7582575 | Method for forming insulation film | Atsuki Fukazawa | 2009-09-01 |
| 7501292 | Method for managing UV irradiation for curing semiconductor substrate | Kiyohiro Matsushita | 2009-03-10 |
| 7274354 | Portable electronic apparatus | Tamotsu Yamamoto, Toyoshi Fukumura | 2007-09-25 |
| 7229935 | Method of forming a thin film by plasma CVD of a silicon-containing source gas | Atsuki Fukazawa, Manabu Kato | 2007-06-12 |
| 6767836 | Method of cleaning a CVD reaction chamber using an active oxygen species | Nelson Loke Chou San, Kiyoshi Satoh | 2004-07-27 |