| 12205061 |
Shared data induced quality control for a chemical mechanical planarization process |
Cesar Clavero, Vid Gopal, Ryan W. Clarke, Esmeralda Yitamben, Anupama Mallikarjunan +6 more |
2025-01-21 |
|
| 9246096 |
Atomic layer deposition of metal oxides for memory applications |
Zhendong Hong, Vidyut Gopal, Imran Hashim, Randall J. Higuchi, Tim Minvielle +1 more |
2016-01-26 |
$68,000 |
| 9202758 |
Method for manufacturing a contact for a semiconductor component and related structure |
Paul R. Besser, Minh Van Ngo, Connie P. Wang, Jinsong Yin |
2015-12-01 |
$753,000 |
| 9087978 |
Transition metal oxide bilayers |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Yun Wang, Takeshi Yamaguchi +1 more |
2015-07-21 |
|
| 9006026 |
Atomic layer deposition of metal oxides for memory applications |
Zhendong Hong, Vidyut Gopal, Imran Hashim, Randall J. Higuchi, Tim Minvielle +1 more |
2015-04-14 |
|
| 8987697 |
Transition metal oxide bilayers |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Yun Wang, Takeshi Yamaguchi +1 more |
2015-03-24 |
|
| 8906736 |
Multifunctional electrode |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Dipankar Pramanik, Yun Wang +2 more |
2014-12-09 |
|
| 8859328 |
Multifunctional electrode |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Dipankar Pramanik, Yun Wang +2 more |
2014-10-14 |
|
| 8846443 |
Atomic layer deposition of metal oxides for memory applications |
Zhendong Hong, Randall J. Higuchi, Vidyut Gopal, Imran Hashim, Tim Minvielle +1 more |
2014-09-30 |
|
| 8779407 |
Multifunctional electrode |
Vidyut Gopal, Imran Hashim, Dipankar Pramanik, Yun Wang, Hong Sheng Yang |
2014-07-15 |
|
| 8735217 |
Multifunctional electrode |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Dipankar Pramanik, Yun Wang +2 more |
2014-05-27 |
|
| 8704203 |
Transition metal oxide bilayers |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Yun Wang, Takeshi Yamaguchi +1 more |
2014-04-22 |
|
| 8569104 |
Transition metal oxide bilayers |
Vidyut Gopal, Imran Hashim, Tim Minvielle, Yun Wang, Takeshi Yamaguchi +1 more |
2013-10-29 |
|
| 8415256 |
Gap-filling with uniform properties |
Alexander H. Nickel, Lu You, Hirokazu Tokuno, Minh Quoc Tran, Minh Van Ngo +2 more |
2013-04-09 |
|
| 8309455 |
SiH4 soak for low hydrogen SiN deposition to improve flash memory device performance |
Sung Jin Kim, Alexander H. Nickel, Minh Van Ngo, Masato Tsuboi, Shinich Imada |
2012-11-13 |
$3,110,000 |
| 8202810 |
Low-H plasma treatment with N2 anneal for electronic memory devices |
Alexander H. Nickel, Allen L. Evans, Minh Quoc Tran, Lu You, Minh Van Ngo +4 more |
2012-06-19 |
$1,687,000 |
| 8026169 |
Cu annealing for improved data retention in flash memory devices |
Lu You, Alexander H. Nickel, Minh Quoc Tran, Minh Van Ngo, Erik Wilson +4 more |
2011-09-27 |
$6,329,000 |
| 7985674 |
SiH4 soak for low hydrogen SiN deposition to improve flash memory device performance |
Sung Jin Kim, Alexander H. Nickel, Minh Van Ngo, Masato Tsuboi, Shinich Imada |
2011-07-26 |
$2,685,000 |
| 7884030 |
Gap-filling with uniform properties |
Alexander H. Nickel, Lu You, Hirokazu Tokuno, Minh Quoc Tran, Minh Van Ngo +2 more |
2011-02-08 |
|
| 7534732 |
Semiconductor devices with copper interconnects and composite silicon nitride capping layers |
Minh Van Ngo, Erik Wilson, Robert A. Huertas, Lu You, Hirokazu Tokuno +2 more |
2009-05-19 |
$8,842,000 |
| 7307027 |
Void free interlayer dielectric |
Minh Van Ngo, Alexander H. Nickel, Jean Y. Yang, Hirokazu Tokuno, Weidong Qian |
2007-12-11 |
|
| 7217660 |
Method for manufacturing a semiconductor component that inhibits formation of wormholes |
Connie P. Wang, Paul R. Besser, Jinsong Yin, Minh Van Ngo |
2007-05-15 |
|
| 6875694 |
Method of treating inlaid copper for improved capping layer adhesion without damaging porous low-k materials |
Minh Van Ngo, Robert A. Huertas |
2005-04-05 |
$7,987,000 |
| 6809043 |
Multi-stage, low deposition rate PECVD oxide |
Minh Van Ngo, Robert A. Huertas |
2004-10-26 |
$3,793,000 |
| 6746971 |
Method of forming copper sulfide for memory cell |
Minh Van Ngo, Sergey Lopatin, Suzette K. Pangrle, Nicholas H. Tripsas |
2004-06-08 |
$3,316,000 |