Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8309455 | SiH4 soak for low hydrogen SiN deposition to improve flash memory device performance | Sung Jin Kim, Alexander H. Nickel, Minh Van Ngo, Hieu Pham, Masato Tsuboi | 2012-11-13 |
| 7985674 | SiH4 soak for low hydrogen SiN deposition to improve flash memory device performance | Sung Jin Kim, Alexander H. Nickel, Minh Van Ngo, Hieu Pham, Masato Tsuboi | 2011-07-26 |