Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10703915 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Meiliang Wang, Matthew R. MacDonald, Richard Ho, Suresh K. Rajaraman | 2020-07-07 |
| 10464953 | Carbon bridged aminosilane compounds for high growth rate silicon-containing films | Meiliang Wang, Xinjian Lei, Suresh K. Rajaraman | 2019-11-05 |
| 10468244 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei | 2019-11-05 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-22 |
| 10422034 | Silicon-based films and methods of forming the same | Xinjian Lei, Anupama Mallikarjunan, Matthew R. MacDonald | 2019-09-24 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Jianheng Li | 2019-09-24 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10316407 | Compositions and methods using same for deposition of silicon-containing films | Xinjian Lei, Moo-Sung Kim, Matthew R. MacDonald | 2019-06-11 |
| 10319862 | Barrier materials for display devices | Robert Gordon Ridgeway, Andrew David Johnson, Anupama Mallikarjunan, Raymond Nicholas Vrtis, Xinjian Lei +3 more | 2019-06-11 |
| 10294250 | Organoaminosilanes and methods for making same | Matthew R. MacDonald, Richard Ho, Xinjian Lei | 2019-05-21 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Ronald Martin Pearlstein, Richard Ho, Daniel P. Spence, Xinjian Lei | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald +2 more | 2018-12-04 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Haripin Chandra, Anupama Mallikarjunan +1 more | 2018-09-18 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Mark Leonard O'Neill | 2018-05-22 |
| 9879340 | Silicon-based films and methods of forming the same | Xinjian Lei, Anupama Mallikarjunan, Matthew R. MacDonald | 2018-01-30 |
| 9809711 | Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process | Ronald Martin Pearlstein, Richard Ho, Xinjian Lei, Steven Gerard Mayorga, Daniel P. Spence | 2017-11-07 |
| 9796739 | AZA-polysilane precursors and methods for depositing films comprising same | Xinjian Lei, Daniel P. Spence | 2017-10-24 |
| 9758534 | Organoaminosilanes and methods for making same | Matthew R. MacDonald, Richard Ho, Xinjian Lei | 2017-09-12 |
| 9677178 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Richard Ho | 2017-06-13 |
| 9640386 | Precursors for CVD silicon carbo-nitride films | Arthur Kenneth Hochberg | 2017-05-02 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Haripin Chandra, Anupama Mallikarjunan +1 more | 2017-04-18 |