Issued Patents All Time
Showing 51–75 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2017-04-04 |
| 9502234 | Methods to prepare silicon-containing films | Xinjian Lei, Bing Han, Mark Leonard O'Neill | 2016-11-22 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |
| 9243324 | Methods of forming non-oxygen containing silicon-based films | Heather Regina Bowen, Jianheng Li, Mark Leonard O'Neill, Andrew David Johnson, Xinjian Lei | 2016-01-26 |
| 9233990 | Organoaminosilanes and methods for making same | Matthew R. MacDonald, Richard Ho, Xinjian Lei | 2016-01-12 |
| 9214630 | Method of making a multicomponent film | Iain Buchanan, Moo-Sung Kim, Sergei Vladimirovich Ivanov, Xinjian Lei, Cheol Seong Hwang +1 more | 2015-12-15 |
| 9200167 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Ronald Martin Pearlstein, Xinjian Lei, Richard Ho, Mark Leonard O'Neill +1 more | 2015-12-01 |
| 9005719 | Organoaminosilane precursors and methods for making and using same | Xinjian Lei, Bing Han, Mark Leonard O'Neill, Ronald Martin Pearlstein, Richard Ho +2 more | 2015-04-14 |
| 8993072 | Halogenated organoaminosilane precursors and methods for depositing films comprising same | Xinjian Lei, Mark Leonard O'Neill, Bing Han, Ronald Martin Pearlstein, Haripin Chandra +2 more | 2015-03-31 |
| 8940648 | Process for producing silicon and oxide films from organoaminosilane precursors | Xinjian Lei, Heather Regina Bowen, Mark Leonard O'Neill | 2015-01-27 |
| 8932675 | Methods for depositing silicon carbo-nitride film | Arthur Kenneth Hochberg | 2015-01-13 |
| 8912353 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Heather Regina Bowen, Hansong Cheng, Xinjian Lei | 2014-12-16 |
| 8906455 | Low temperature deposition of silicon-containing films | Liu Yang, Xinjian Lei, Bing Han, Eugene Joseph Karwacki, Jr., Hansong Cheng | 2014-12-09 |
| 8889235 | Dielectric barrier deposition using nitrogen containing precursor | Anupama Mallikarjunan, Raymond Nicholas Vrtis, Laura M. Matz, Mark Leonard O'Neill, Andrew David Johnson | 2014-11-18 |
| 8828505 | Plasma enhanced cyclic chemical vapor deposition of silicon-containing films | Hareesh Thridandam, Xinjian Lei, Thomas Richard Gaffney, Eugene Joseph Karwacki, Jr. | 2014-09-09 |
| 8771807 | Organoaminosilane precursors and methods for making and using same | Xinjian Lei, Bing Han, Mark Leonard O'Neill, Ronald Martin Pearlstein, Richard Ho +2 more | 2014-07-08 |
| 8765223 | Binary and ternary metal chalcogenide materials and method of making and using same | Liu Yang | 2014-07-01 |
| 8703624 | Dielectric films comprising silicon and methods for making same | Liu Yang, Kirk Scott Cuthill, Bing Han, Mark Leonard O'Neill | 2014-04-22 |
| 8703625 | Methods to prepare silicon-containing films | Liu Yang, Bing Han, Kirk Scott Cuthill, Mark Leonard O'Neill | 2014-04-22 |
| 8590705 | Cylinder surface treated container for monochlorosilane | Philip E. Behm, Wayne Thomas McDermott, Ronald Martin Pearlstein, Sai-Hong Andrew Lo, Agnes Derecskei-Kovacs | 2013-11-26 |
| 8580993 | Amino vinylsilane precursors for stressed SiN films | Vasil Vorsa, Andrew David Johnson | 2013-11-12 |
| 8563353 | Method of making a multicomponent film | Liu Yang, Xinjian Lei, Iain Buchanan | 2013-10-22 |
| 8530361 | Process for producing silicon and oxide films from organoaminosilane precursors | Xinjian Lei, Heather Regina Bowen, Mark Leonard O'Neill | 2013-09-10 |