Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169234 | Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder | Thomas Weeks, Loren Jacobs, Eric Wood, Michael Halpin | 2007-01-30 |
| 5573566 | Method of making a quartz dome reactor chamber | Dane H. Anderberg | 1996-11-12 |