Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8557702 | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers | Robert Brennan Milligan, Steven Marcus | 2013-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8557702 | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers | Robert Brennan Milligan, Steven Marcus | 2013-10-15 |