Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7666474 | Plasma-enhanced pulsed deposition of metal carbide films | Dong Li, Glen Wilk, Brennan Milligan | 2010-02-23 |
| 7608549 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Glen Wilk, Petri Raisanen, Kai-Erik Elers | 2009-10-27 |
| 7595270 | Passivated stoichiometric metal nitride films | Kai-Erik Elers | 2009-09-29 |
| 6303520 | Silicon oxynitride film | Dim-Lee Kwong, Jeff Gelpey | 2001-10-16 |
| 6077751 | Method of rapid thermal processing (RTP) of ion implanted silicon | Frederique Glowacki, Barbara Froeschle | 2000-06-20 |