Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612158 | Device for determining the temperature of a substrate | Denise Reichel, Wilfried Lerch, Wolfgang Skorupa, Thomas Schumann | 2017-04-04 |
| 6303520 | Silicon oxynitride film | Dim-Lee Kwong, Steven Marcus | 2001-10-16 |