Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Andrew Nguyen, Xue Yang Chang, Yu Lei, Xianmin Tang, John C. Forster +2 more | 2024-09-24 |
| 11913777 | Detector for process kit ring wear | Phillip Criminale | 2024-02-27 |
| 11835146 | Symmetric flow valve for flow conductance control | Andrew Nguyen, Xue Yang Chang, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan | 2023-12-05 |
| 11199267 | Symmetric flow valve for higher flow conductance | Andrew Nguyen, Xue Yang Chang, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan | 2021-12-14 |
| 10672591 | Apparatus for removing particles from a twin chamber processing system | Andrew Nguyen, Tom K. Cho, Kartik Ramaswamy | 2020-06-02 |
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins +2 more | 2016-09-20 |
| 9287095 | Semiconductor system assemblies and methods of operation | Andrew Nguyen, Kartik Ramaswamy, Srinivas D. Nemani, Bradley J. Howard | 2016-03-15 |