| 12100576 |
Metal oxide preclean chamber with improved selectivity and flow conductance |
Andrew Nguyen, Xue Yang Chang, Yu Lei, Xianmin Tang, John C. Forster +2 more |
2024-09-24 |
| 11913777 |
Detector for process kit ring wear |
Phillip Criminale |
2024-02-27 |
| 11835146 |
Symmetric flow valve for flow conductance control |
Andrew Nguyen, Xue Yang Chang, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan |
2023-12-05 |
| 11199267 |
Symmetric flow valve for higher flow conductance |
Andrew Nguyen, Xue Yang Chang, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan |
2021-12-14 |
| 10672591 |
Apparatus for removing particles from a twin chamber processing system |
Andrew Nguyen, Tom K. Cho, Kartik Ramaswamy |
2020-06-02 |
| 9449794 |
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna |
Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins +2 more |
2016-09-20 |
| 9287095 |
Semiconductor system assemblies and methods of operation |
Andrew Nguyen, Kartik Ramaswamy, Srinivas D. Nemani, Bradley J. Howard |
2016-03-15 |
