Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11645900 | Early warning method for icefall-caused moraine lake outburst disasters | Yang Jia, Shengfu Li, Yonggang Ge, Qiang Yu, Changfeng Liu +7 more | 2023-05-09 |
| 11562909 | Directional selective junction clean with field polymer protections | Xuesong Lu, Tae Hong Ha, Xianmin Tang, Andrew Nguyen, Tza-Jing Gung +4 more | 2023-01-24 |
| 11515200 | Selective tungsten deposition within trench structures | Yi Xu, Yufei Hu, He Ren, Shi YOU, Kazuya Daito | 2022-11-29 |
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
| 11417568 | Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill | Wei Lei, Yi Xu, Tae Hong Ha, Raymond Hung, Shirish A. PETHE | 2022-08-16 |
| 11404313 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Kazuya Daito, Da He, Jiajie Cen | 2022-08-02 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Kazuya Daito, Yi Xu +13 more | 2022-06-07 |
| 11230508 | Green oxidizer compositions and methods | James E. Smith, Chen Zhang | 2022-01-25 |
| 11171045 | Deposition of metal films with tungsten liner | Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2021-11-09 |
| 10753900 | Real-time in situ sensing of water-related parameters using micro-electrode array | Baikun Li, Zhiheng Xu | 2020-08-25 |
| 10727119 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Kai Wu, Mehul Naik, Zhiyuan Wu +2 more | 2020-07-28 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Xinyu Fu, Srinivas Gandikota +2 more | 2020-06-30 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Paul F. Ma, Wei V. Tang, Wenyu Zhang, Shih Chung Chen +6 more | 2020-05-26 |
| 10508339 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2019-12-17 |
| 10456774 | Biotemplated perovskite nanomaterials | Nurxat Nuraje, Angela M. Belcher | 2019-10-29 |
| 10442982 | Multifunctional particles for enhanced oil recovery | Angela M. Belcher, Nurxat Nuraje, Hiroshi Atsumi, Xunpei LIU | 2019-10-15 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Xinyu Fu, Srinivas Gandikota +2 more | 2019-04-23 |
| 10256144 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Kai Wu, Mehul Naik, Zhiyuan Wu +2 more | 2019-04-09 |
| 10228345 | High temperature sensor for reducing gas | Yixin Liu | 2019-03-12 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, Yixiong Yang, CHEN-HAN LIN, Yi Xu +8 more | 2019-01-01 |
| 9989247 | Pyrolysis-combustion dual-bed system for eliminating contamination by combustion of high-sodium coal | Liyong Cao, Qi Du, Wei Fan, Zhengning Liu, Pan Guo +5 more | 2018-06-05 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu, Kazuya Daito +9 more | 2018-04-17 |
| 9927119 | Dual-bed system for preventing boiler heating surface from being contaminated | Liyong Cao, Wei Fan, Qi Du, Pan Guo, Zhengning Liu +5 more | 2018-03-27 |