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Home › Process chamber lid design with built-in plasma source for short lifetime species

Process chamber lid design with built-in plasma source for short lifetime species

US Patent 9004006 · Granted Apr 14, 2015

Estimated economic value: $19,339,000 ⓘ

Assignee

Applied Materials

Inventors

Chien-Teh Kao (51 patents)
Hyman Lam (15 patents)
Mei Chang (175 patents)
David T. Or (23 patents)
Nicholas R. Denny (15 patents)
Xiaoxiong Yuan (43 patents)

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